Cryopump Repair Parts

Specialty Fluids Company is now offering a complete line of quality low cost cryopump repair parts. These non OEM products are manufactured to meet or exceed the original manufacturers specifications and are direct replacements for parts made by CTI-Cryogenics® and Austin Scientific®.

Cryogenic high vacuum pumps are used extensively in applications requiring clean fast pumping to high and ultra-high vacuum levels. From space simulation to semiconductor manufacturing the cryopump is often the only choice for long term service or critical vacuum environments.

While easy to operate and well suited for many applications the initial cost of a cryopump system can be significantly higher than other pumping systems. Maintenance and rebuilds although infrequent can also cost more than other pumps. Fortunately routine maintenance and repairs can be successfully carried out by end-users with minimal vacuum or cryopump knowledge. All of our repair kits include detailed instructions and we are available to answer any questions you may have.

²Cryo-Plex is a registered trademark of Austin Scientific Co., Oxford Instruments